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Dainippon Screen Introduces Wafer Cleaning System for Green Devices

Tokyo, Japan - Jun 28, 2010 (PRN): Dainippon Screen has developed the CW-1500 compact wet station, a batch-type automatic cleaning system suited to the manufacturing of eco-friendly products known as "green devices." Sales of the system will commence in July 2010.

The launch of the CW-1500 compact wet station, the first product to result from the FRONTIER project, will mark Screen's full-scale entry into the green device market sector.

In developing the system, Screen utilized cleaning technologies and expertise cultivated in the development of semiconductor manufacturing equipment, a field in which it has a track record of thousands of installations worldwide.

Through the uncompromising pursuit of cost performance by means including the narrowing down of system functions, Screen achieved a reduction in footprint to approximately one-third that of its previous batch-type automatic cleaning system as well as a low cost.

Furthermore, since the CW-1500 delivers the productivity necessary for the mass production of green devices, it is suitable for wide-ranging applications, from the replacement of conventional manual cleaning to R&D and high-variety low-volume production.

Screen plans to expand the product line for the FRONTIER series by following the CW-1500 launch with a series of market introductions of equipment suited to the manufacturing of green devices. Moreover, through the development of this equipment, Screen will step up its activities to achieve a low-carbon world.



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